Stabilization of zinc-blende cubic AlN in AlN/W superlattices

被引：15

作者：

Kim, IW ^{[1
]}

Madan, A ^{[1
]}

Guruz, MW ^{[1
]}

Dravid, VP ^{[1
]}

Barnett, SA ^{[1
]}

机构：

[1] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2001年 / 19卷 / 05期

关键词：

D O I：

10.1116/1.1372897

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

AlN/W superlattices with bilayer periods of 3.5-7 mn were grown on MgO (001) by magnetron sputtering. For AlN thicknesses l(AlN)less than or equal to1.5nm, a cubic phase of AlN was observed using high-resolution cross-sectional transmission electron microscopy and x-ray diffraction (XRD). Pole-figure XRD scans showed a reflection that matched the theoretically predicted interplanar spacing of zinc-blende, phase (Zb-AlN), and that could not be explained by either the wurtzite or rocksalt structures. The stabilization of zb-AlN is explained as a result of good interfacial matching between W(100) and zb-AlN(011). When l(AlN) was increased above 1.5 nm, XRD scans showed a rapid decrease in satellite peak intensities, indicating a degradation of the layered structure, and the appearance of a wurtzite structure. (C) 2001 American Vacuum Society.

引用

页码：2069 / 2073

页数：5

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