Synthesis of ordered large-scale ZnO nanopore arrays

被引:60
作者
Ding, GQ [1 ]
Shen, WZ [1 ]
Zheng, MJ [1 ]
Fan, DH [1 ]
机构
[1] Shanghai Jiao Tong Univ, Dept Phys, Lab Condensed Matter Spectroscopy & Optoelect Phy, Shanghai 200030, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1063/1.2182025
中图分类号
O59 [应用物理学];
学科分类号
摘要
An effective approach is demonstrated for growing ordered large-scale ZnO nanopore arrays through radio-frequency magnetron sputtering deposition on porous alumina membranes (PAMs). The realization of highly ordered hexagonal ZnO nanopore arrays benefits from the unique properties of ZnO (hexagonal structure, polar surfaces, and preferable growth directions) and PAMs (controllable hexagonal nanopores and localized negative charges). Further evidence has been shown through the effects of nanorod size and thermal treatment of PAMs on the yielded morphology of ZnO nanopore arrays. This approach opens the possibility of creating regular semiconducting nanopore arrays for the application of filters, sensors, and templates.
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页数:3
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