Microlenses fabricated by ultraviolet excimer laser irradiation of poly(methyl methacrylate) followed by styrene diffusion

被引：29

作者：

Lazare, S

Lopez, J

Turlet, JM

Kufner, M

Kufner, S

Chavel, P

机构：

[1] UNIV BORDEAUX 1,CTR PHYS MOL OPT & HERTZIENNE,CNRS,URA 283,F-33405 TALENCE,FRANCE

[2] FREE UNIV BRUSSELS,LAB PHONTON COMP & PERCEPT,DEPT APPL PHYS TW TONA,B-1050 BRUSSELS,BELGIUM

[3] UNIV PARIS 11,INST OPT THEOR & APPL,CNRS,URA 14,F-911403 ORSAY,FRANCE

来源：

APPLIED OPTICS | 1996年 / 35卷 / 22期

关键词：

microlens array; excimer laser radiation; PMMA; styrene diffusion;

D O I：

10.1364/AO.35.004471

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new technique of microlens array fabrication based on the use of excimer laser radiation is described. Poly(methyl methacrylate) (PMMA) substrates are treated with many low-energy KrF laser pulses and exposed to styrene vapor. The irradiated material swells, producing spherical microlenses that are stabilized by UV polymerization. The chemistry of this process and the optical quality of the lenses are discussed. (C) 1996 Optical Society of America

引用

页码：4471 / 4475

页数：5

共 9 条

[1]

BORELLI NF, 1985, APPL OPTICS, V24, P2520

[2] DEGRADATION OF POLY(METHYLMETHACRYLATE) BY DEEP ULTRAVIOLET, X-RAY, ELECTRON-BEAM, AND PROTON-BEAM IRRADIATIONS [J].