The Role of Surface Oxygen in the Growth of Large Single-Crystal Graphene on Copper

被引:1019
作者
Hao, Yufeng [1 ,2 ]
Bharathi, M. S. [3 ]
Wang, Lei [4 ]
Liu, Yuanyue [5 ,6 ]
Chen, Hua [7 ]
Nie, Shu [8 ]
Wang, Xiaohan [1 ,2 ]
Chou, Harry [1 ,2 ]
Tan, Cheng [1 ,2 ]
Fallahazad, Babak [9 ]
Ramanarayan, H. [3 ]
Magnuson, Carl W. [1 ,2 ]
Tutuc, Emanuel [9 ]
Yakobson, Boris I. [5 ,6 ]
McCarty, Kevin F. [8 ]
Zhang, Yong-Wei [3 ]
Kim, Philip [10 ]
Hone, James [4 ]
Colombo, Luigi [11 ]
Ruoff, Rodney S. [1 ,2 ]
机构
[1] Univ Texas Austin, Dept Mech Engn, Austin, TX 78712 USA
[2] Univ Texas Austin, Mat Sci & Engn Program, Austin, TX 78712 USA
[3] ASTAR, Inst High Performance Comp, Singapore 138632, Singapore
[4] Columbia Univ, Dept Mech Engn, New York, NY 10027 USA
[5] Rice Univ, Dept Mech Engn & Mat Sci, Houston, TX 77005 USA
[6] Rice Univ, Dept Chem, Houston, TX 77005 USA
[7] Univ Texas Austin, Dept Phys, Austin, TX 78712 USA
[8] Sandia Natl Labs, Livermore, CA 94550 USA
[9] Univ Texas Austin, Microelect Res Ctr, Austin, TX 78758 USA
[10] Columbia Univ, Dept Phys, New York, NY 10027 USA
[11] Texas Instruments Inc, Dallas, TX 75243 USA
基金
美国国家科学基金会;
关键词
CHEMICAL-VAPOR-DEPOSITION; GRAIN-BOUNDARIES; METAL-SURFACES; HIGH-QUALITY; ACTIVATION; NUCLEATION; FOILS; FILMS; EDGE; CU;
D O I
10.1126/science.1243879
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The growth of high-quality single crystals of graphene by chemical vapor deposition on copper (Cu) has not always achieved control over domain size and morphology, and the results vary from lab to lab under presumably similar growth conditions. We discovered that oxygen (O) on the Cu surface substantially decreased the graphene nucleation density by passivating Cu surface active sites. Control of surface O enabled repeatable growth of centimeter-scale single-crystal graphene domains. Oxygen also accelerated graphene domain growth and shifted the growth kinetics from edge-attachment-limited to diffusion-limited. Correspondingly, the compact graphene domain shapes became dendritic. The electrical quality of the graphene films was equivalent to that of mechanically exfoliated graphene, in spite of being grown in the presence of O.
引用
收藏
页码:720 / 723
页数:4
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