Integration of magnetooptical waveguides onto a III-V semiconductor surface

被引:13
作者
Izuhara, T [1 ]
Fujita, J
Levy, M
Osgood, RM
机构
[1] Columbia Univ, Microelect Sci Labs, New York, NY 10027 USA
[2] Telephoton Inc, Wilmington, MA 01887 USA
[3] Michigan Technol Univ, Dept Phys, Houghton, MI 49931 USA
关键词
bonding; integrated optics; magnetooptic films; optical losses; optical waveguides;
D O I
10.1109/68.980494
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Optical waveguides fabricated on a yttrium iron garnet (YIG) substrate are integrated onto a semiconductor surface by using ridge waveguides patterned onto a prefabricated recess in the YIG surface. The recess separates the waveguides from the semiconductor substrate with an air-gap. This structure makes it possible to avoid coupling light within the YIG waveguides into the semiconductor substrate which has a higher refractive index. The excess optical loss due to the coupling can be as low as less than or equal to0.1 dB/cm with a 1-mum-wide air-gap. The calculated coupling loss is confirmed by comparing the guided TE and TM modes.
引用
收藏
页码:167 / 169
页数:3
相关论文
共 7 条
[1]  
Born M., 1999, PRINCIPLES OPTICS
[2]   THIN-FILMS FIELD-TRANSFER MATRIX-THEORY OF PLANAR MULTILAYER WAVEGUIDES AND REFLECTION FROM PRISM-LOADED WAVEGUIDES [J].
CHILWELL, J ;
HODGKINSON, I .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1984, 1 (07) :742-753
[3]   BURIED-OXIDE SILICON-ON-INSULATOR STRUCTURES .1. OPTICAL WAVE-GUIDE CHARACTERISTICS [J].
EMMONS, RM ;
KURDI, BN ;
HALL, DG .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1992, 28 (01) :157-163
[4]   Waveguide optical isolator based on Mach-Zehnder interferometer [J].
Fujita, J ;
Levy, M ;
Osgood, RM ;
Wilkens, L ;
Dötsch, H .
APPLIED PHYSICS LETTERS, 2000, 76 (16) :2158-2160
[5]   Direct wafer bonding and transfer of 10-μm-thick magnetic garnet films onto semiconductor surfaces [J].
Izuhara, T ;
Levy, M ;
Osgood, RM .
APPLIED PHYSICS LETTERS, 2000, 76 (10) :1261-1263
[6]  
SHACKLETTE LW, 1998, Patent No. 5850498
[7]   Demonstration of an optical isolator with a semiconductor guiding layer that was obtained by use of a nonreciprocal phase shift [J].
Yokoi, H ;
Mizumoto, T ;
Shinjo, N ;
Futakuchi, N ;
Nakano, Y .
APPLIED OPTICS, 2000, 39 (33) :6158-6164