Gold nanograins deposited from a liquid metal ion source

被引：10

作者：

Vieu, C ^{[1
]}

Gierak, J ^{[1
]}

David, C ^{[1
]}

Lagadec, Y ^{[1
]}

Bourlange, A ^{[1
]}

Larigaldie, D ^{[1
]}

Wang, Z ^{[1
]}

Flicstein, J ^{[1
]}

Launois, H ^{[1
]}

机构：

[1] CNRS,MICROSTRUCT & MICROELECT LAB,L2M,F-92225 BAGNEUX,FRANCE

来源：

MICROELECTRONIC ENGINEERING | 1997年 / 35卷 / 1-4期

关键词：

D O I：

10.1016/S0167-9317(96)00106-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Gold nanograins of dimensions ranging from 1 to 4 mm are deposited from a liquid metal ion source at variable landing energies. The distribution of nanograins can be selected by wisely playing with the parameters governing the deposition like the energy of the incident particles (500 eV - 10 keV), the emission current of the source (20 mu A - 100 mu A) and the deposition time (10 s - 45 s). The results of both dimensionality and pitch shows the potentiality of this technique to produce very small metallic islands of high stability suitable for fabricating metallic Coulomb blockade devices.

引用

页码：349 / 352

页数：4

共 11 条

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