Growth of InGaN/GaN multiple-quantum-well blue light-emitting diodes on silicon by metalorganic vapor phase epitaxy

被引:153
作者
Tran, CA
Osinski, A
Karlicek, RF
Berishev, I
机构
[1] EMCORE Corp, Somerset, NJ 08873 USA
[2] Univ Houston, Ctr Space Vacuum Epitaxy, Houston, TX 77204 USA
关键词
D O I
10.1063/1.124733
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the growth of InGaN/GaN multiple-quantum-well blue light-emitting diode (LED) structures on Si(111) using metalorganic vapor phase epitaxy. By using growth conditions optimized for sapphire substrates, a full width at half maximum (FWHM) (102) x-ray rocking curve of less than 600 arcsec and a room-temperature photoluminescence peak at 465 nm with a FWHM of 35 nm was obtained. Simple LEDs emitting bright electroluminescence between 450 and 480 nm with turn-on voltages at 5 V were demonstrated. (C) 1999 American Institute of Physics. [S0003-6951(99)00737-8].
引用
收藏
页码:1494 / 1496
页数:3
相关论文
共 6 条
[1]   Multicolored light emitters on silicon substrates [J].
Guha, S ;
Bojarczuk, NA .
APPLIED PHYSICS LETTERS, 1998, 73 (11) :1487-1489
[2]   Ultraviolet and violet GaN light emitting diodes on silicon [J].
Guha, S ;
Bojarczuk, NA .
APPLIED PHYSICS LETTERS, 1998, 72 (04) :415-417
[3]  
Marchand H, 1998, MRS INTERNET J N S R, V3
[4]   Phase separation in InGaN/GaN multiple quantum wells and its relation to brightness of blue and green LEDs [J].
Tran, CA ;
Karlicek, RF ;
Schurman, M ;
Osinsky, A ;
Merai, V ;
Li, Y ;
Eliashevich, I ;
Brown, MG ;
Nering, J ;
Ferguson, I ;
Stall, R .
JOURNAL OF CRYSTAL GROWTH, 1998, 195 (1-4) :397-400
[5]   Structural properties of GaN grown by MOVPE turbodisc mass-production reactor [J].
Tran, CA ;
Karlicek, R ;
Schurman, M ;
Salagaj, T ;
Cassidy, R ;
Ferguson, I ;
Thompson, AG ;
Stall, RA ;
Hwang, CY .
JOURNAL OF CRYSTAL GROWTH, 1997, 174 (1-4) :647-652
[6]   Growth and characterization of high-efficiency InGaN MQW blue and green LEDs from large-scale production MOCVD reactors [J].
Tran, CA ;
Karlicek, RF ;
Brown, MG ;
Eliashevich, I ;
Gurary, A ;
Stall, R .
LIGHT-EMITTING DIODES: RESEARCH, MANUFACTURING, AND APPLICATIONS III, 1999, 3621 :43-49