ZnO-doped LiNbO3 (LN) liquid-phase epitaxial thin films grown on LN substrates were investigated as modified LN substrates for optical waveguide devices. The potential for optical use as substrates compatible with conventional ones was examined in quasi-phase-matched second-harmonic generation (SHG) devices from the viewpoint of the domain inversion process and optical damage properties. The formation of a periodically inverted-domain structure and the increased optical damage resistance in SHG were demonstrated. (C) 1999 Elsevier Science B.V. All rights reserved.