Hetero-epitaxial growth of Cu(In,Ga)S2 on Si substrates

被引:14
作者
Metzner, H
Reislöhner, U
Cieslak, J
Witthuhn, W
Hahn, T
Kräusslich, J
机构
[1] Univ Jena, Inst Festkorperphys, D-07743 Jena, Germany
[2] Univ Jena, Inst Opt & Quantenelekt, D-07743 Jena, Germany
关键词
molecular beam epitaxy; Cu(In; Ga)S-2; X-ray diffraction;
D O I
10.1016/S0040-6090(01)01531-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
On the way to perfectly lattice-matched Cu(In,Ga)S-2, we present the first CuGaS2 films epitaxially grown on Si substrates and compare their structural properties to epitaxial CuInS2. on the same type of substrate. Both of these chalcopyrites have been grown on sulfur-terminated Si(111) and showed a six-fold surface symmetry in low energy electron diffraction. Composition was controlled in and ex-situ using Auger electron spectroscopy and Rutherford backscattering, respectively. A detailed film analysis by means of X-ray diffraction methods yielded the lattice parameters of the epitaxial layers, wider rocking curves of the gallium compound as compared to the indium compound, and showed the suppression of twin formation in Ga-rich CuGaS2,. The results indicate that a perfect lattice match between Cu(In(lambda-x)Galambda)S-2 and Si will be attainable with x approximate to 0.5. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:13 / 16
页数:4
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