A novel Love mode device with nanocrystalline ZnO film for gas sensing applications

被引：11

作者：

Kalantar-Zadeh, K ^{[1
]}

Trinchi, A ^{[1
]}

Wlodarski, W ^{[1
]}

Holland, A ^{[1
]}

Atashbar, MZ ^{[1
]}

机构：

[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic 3001, Australia

来源：

PROCEEDINGS OF THE 2001 1ST IEEE CONFERENCE ON NANOTECHNOLOGY | 2001年

关键词：

D O I：

10.1109/NANO.2001.966484

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a novel Surface Acoustic Wave (SAW) gas sensor will be presented. The sensor is based on a ZnO (2.8mum) /90degrees rotated ST-cut quartz crystal structure. Such a structure allows the propagation of Love mode SAWs. The ZnO layer performs as both the acoustic wave guiding media and the gas sensitive film. The response of the sensor was investigated for different concentrations Of O-2 and 100 ppm C3H8 in N-2 gas. The sensor is highly stable due to the large electromechanical coupling coefficient of the device, and is able to detect oxygen concentrations as low as 1 ppm in nitrogen gas.

引用

页码：556 / 561

页数：6

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