Carbon monoxide gas-sensing properties of CeO2-ZnO thin films

被引:76
作者
Al-Kuhaili, M. F. [1 ]
Durrani, S. M. A. [1 ]
Bakhtiari, I. A. [1 ]
机构
[1] King Fahd Univ Petr & Minerals, Dept Phys, Dhahran 31261, Saudi Arabia
关键词
Thin film; CO sensor; ZnO; CeO2; Semiconductor gas sensor;
D O I
10.1016/j.apsusc.2008.08.058
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Mixed films of zinc oxide (ZnO) and cerium oxide (CeO2) were deposited on unheated substrates by co-evaporation. The films were annealed in air at 500 degrees C for 2 h. The surface morphology of the films was characterized using atomic force microscopy. The chemical composition was determined using X-ray photoelectron spectroscopy. The optical properties were derived from normal-incidence reflectance and transmittance measurements. The films were investigated for the detection of carbon monoxide. The effects of the operating temperature and gas concentration on the performance of the sensor were investigated. The sensor response and recovery times were also measured. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:3033 / 3039
页数:7
相关论文
共 39 条
[1]   Effect of annealing on the optical properties of thermally evaporated ZnO films [J].
Aly, SA ;
El Sayed, NZ ;
Kaid, MA .
VACUUM, 2001, 61 (01) :1-7
[2]   Columnar CeO2 nanostructures for sensor application [J].
Barreca, Davide ;
Gasparotto, Alberto ;
Maccato, Chiara ;
Maragno, Cinzia ;
Tondello, Eugenio ;
Comini, Elisabetta ;
Sberveglieri, Giorgio .
NANOTECHNOLOGY, 2007, 18 (12)
[3]   Gas sensing properties of thin- and thick-film tin-oxide materials [J].
Becker, T ;
Ahlers, S ;
Bosch-vonBraunmühl, C ;
Müller, G ;
Kiesewetter, O .
SENSORS AND ACTUATORS B-CHEMICAL, 2001, 77 (1-2) :55-61
[4]   Chemical reactions in the detection of acetone and NO by a CeO2 thin film [J].
Bene, R ;
Perczel, IV ;
Réti, F ;
Meyer, FA ;
Fleisher, M ;
Meixner, H .
SENSORS AND ACTUATORS B-CHEMICAL, 2000, 71 (1-2) :36-41
[5]   Influence of the deposition method on the morphology and elemental composition of SnO2 films for gas sensing:: atomic force and X-ray photoemission spectroscopy analysis [J].
Bittencourt, C ;
Llobet, E ;
Silva, MAP ;
Landers, R ;
Nieto, L ;
Vicaro, KO ;
Sueiras, JE ;
Calderer, J ;
Correig, X .
SENSORS AND ACTUATORS B-CHEMICAL, 2003, 92 (1-2) :67-72
[6]   The structural and optical property dependence of disordered copper oxide on oxygen content [J].
Boucher, R .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2005, 66 (05) :906-910
[7]   Preparation and characterization of Al and Mn doped ZnO (ZnO: (Al, Mn)) transparent conducting oxide films [J].
Cao, HT ;
Pei, ZL ;
Gong, J ;
Sun, C ;
Huang, RF ;
Wen, LS .
JOURNAL OF SOLID STATE CHEMISTRY, 2004, 177 (4-5) :1480-1487
[8]   The effects of thickness and operation temperature on ZnO:Al thin film CO gas sensor [J].
Chang, JF ;
Kuo, HH ;
Leu, IC ;
Hon, MH .
SENSORS AND ACTUATORS B-CHEMICAL, 2002, 84 (2-3) :258-264
[9]   Highly sensitive mixed oxide sensors for the detection of ethanol [J].
Costello, BPJD ;
Ewen, RJ ;
Guernion, N ;
Ratcliffe, NM .
SENSORS AND ACTUATORS B-CHEMICAL, 2002, 87 (01) :207-210
[10]   Carbon monoxide gas-sensing properties of electron-beam deposited cerium oxide thin films [J].
Durrani, S. M. A. ;
Al-Kuhaili, M. F. ;
Bakhtiari, I. A. .
SENSORS AND ACTUATORS B-CHEMICAL, 2008, 134 (02) :934-939