Carbon monoxide gas-sensing properties of electron-beam deposited cerium oxide thin films

被引：50

作者：

Durrani, S. M. A. ^{[1
]}

Al-Kuhaili, M. F. ^{[1
]}

Bakhtiari, I. A. ^{[1
]}

机构：

[1] King Fahd Univ Petr & Minerals, Dept Phys, Dhahran 31261, Saudi Arabia

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2008年 / 134卷 / 02期

关键词：

Thin film; AFM; XPS; CO sensor; CeO2; Semiconductor gas sensor;

D O I：

10.1016/j.snb.2008.06.049

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Thin films of cerium oxide were deposited by electron-beam (e-beam) evaporation on unheated substrates. The films were annealed in air at 500 degrees C for 2 h, and were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy imaging and optical spectrophotometry. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. The effect of bias voltage, operating temperature and gas concentration on the performance of the sensor is reported. The sensor response and recovery times were also measured, and were found to be highly efficient. (c) 2008 Elsevier B.V. All rights reserved.

引用

页码：934 / 939

页数：6

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