Gas-sensitive GaAs-MESFETs

被引：15

作者：

Jaegle, M ^{[1
]}

Steiner, K ^{[1
]}

机构：

[1] FRAUNHOFER INST PHYS MESSTECH,D-79110 FREIBURG,GERMANY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 34卷 / 1-3期

关键词：

GaAs-MESFETs; gas sensor; catalytic gate;

D O I：

10.1016/S0925-4005(96)01859-X

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Gas-sensitive GaAs-MESFETs with catalytic gates have been fabricated. Gas response of I-V output and transfer characteristics are discussed. Pd- and Pt-catalysed MESFETs show NO2 and NH3-sensitivity. There is no cross sensitivity to H2O, CO, CO2 and CH4 below 100 degrees C operating temperatures. Possible sensor mechanisms are proposed.

引用

收藏

页码：543 / 547

页数：5

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