DIFFERENT CATALYTIC METALS (PT, PD AND IR) FOR GAAS SCHOTTKY-BARRIER SENSORS

被引：36

作者：

LECHUGA, LM

CALLE, A

GOLMAYO, D

BRIONES, F

机构：

[1] Centro Nacional de Microelectrónica (CSIC), 28006 Madrid, Serrano

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1992年 / 7卷 / 1-3期

关键词：

D O I：

10.1016/0925-4005(92)80374-7

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The effect of using different catalytic metals in GaAs Schottky diode sensors is evaluated for hydrogen and ammonia. Both thick and porous metal films are tested and optimized in view of the application.

引用

页码：614 / 618

页数：5

共 9 条

[1] PALLADIUM AND PLATINUM GATE METAL-OXIDE-SEMICONDUCTOR CAPACITORS IN HYDROGEN AND OXYGEN MIXTURES
ARMGARTH, M
SODERBERG, D
LUNDSTROM, I
[J]. APPLIED PHYSICS LETTERS, 1982, 41 (07) : 654 - 655
[2] ADSORPTION OF HYDROGEN ON PALLADIUM SINGLE-CRYSTAL SURFACES
CONRAD, H
ERTL, G
LATTA, EE
[J]. SURFACE SCIENCE, 1974, 41 (02) : 435 - 446
[3] A NEW HYDROGEN SENSOR BASED ON A PT/GAAS SCHOTTKY DIODE
LECHUGA, LM
CALLE, A
GOLMAYO, D
TEJEDOR, P
BRIONES, F
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (01) : 159 - 162
[4] THE AMMONIA SENSITIVITY OF PT/GAAS SCHOTTKY-BARRIER DIODES
LECHUGA, LM
CALLE, A
GOLMAYO, D
BRIONES, F
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (06) : 3348 - 3354
[5] Lewis F.A., 1967, PALLADIUM HYDROGEN S
[6] CATALYTIC METALS AND FIELD-EFFECT DEVICES - A USEFUL COMBINATION
LUNDSTROM, I
SPETZ, A
WINQUIST, F
ACKELID, U
SUNDGREN, H
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1990, 1 (1-6) : 15 - 20
[7] LUNDSTROM I, 2ND P INT M CHEM SEN, P387
[8] PD-ON-GAAS SCHOTTKY CONTACT - ITS BARRIER HEIGHT AND RESPONSE TO HYDROGEN
NIE, HY
NANNICHI, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1991, 30 (05): : 906 - 913
[9] A STUDY OF PD-SI MIS SCHOTTKY-BARRIER DIODE HYDROGEN DETECTOR
RUTHS, PF
ASHOK, S
FONASH, SJ
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1981, 28 (09) : 1003 - 1009

← 1 →