Control of hole carrier density of polycrystalline Cu2O thin films by Si doping

被引：62

作者：

Ishizuka, S ^{[1
]}

Kato, S ^{[1
]}

Okamoto, Y ^{[1
]}

Akimoto, K ^{[1
]}

机构：

[1] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan

来源：

APPLIED PHYSICS LETTERS | 2002年 / 80卷 / 06期

关键词：

D O I：

10.1063/1.1448398

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effects on the electrical properties of Si doping into Cu2O thin films deposited by reactive sputtering were studied. The hole density increased from 1x10(15) to 1x10(17) cm(-3) with increasing Si content and the minimum resistivity obtained was 12 Omega cm. It was suggested that the electrically active acceptor with an activation energy of 0.19 eV was generated by Si doping. Infrared absorption measurements indicated the formation of silicate in Si-doped Cu2O. The mechanism for Si acting as an acceptor in Cu2O is discussed and modeled based on the silicate formation in Cu2O. (C) 2002 American Institute of Physics.

引用

页码：950 / 952

页数：3

共 14 条

[1] STRUCTURE CRISTALLINE DU METASILICATE DE SODIUM ANHYDRE, NA2SIO3 [J].

GRUND, A ;

PIZY, MM .

ACTA CRYSTALLOGRAPHICA, 1952, 5 (06) :837-840

[2] Thin-film deposition of Cu2O by reactive radio-frequency magnetron sputtering [J].

Ishizuka, S ;

Maruyama, T ;

Akimoto, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2000, 39 (8A) :L786-L788

[3] Nitrogen doping into Cu2O thin films deposited by reactive radio-frequency magnetron sputtering [J].

Ishizuka, SO ;

Kato, S ;

Maruyama, T ;

Akimoto, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (4B) :2765-2768

[4] Evidence for the formation of SiON glasses [J].

Kohn, S ;

Hoffbauer, W ;

Jansen, M ;

Franke, R ;

Bender, S .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1998, 224 (03) :232-243

[5] Novel spray-pyrolysis deposition of cuprous oxide thin films [J].

Kosugi, T ;

Kaneko, S .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1998, 81 (12) :3117-3124

[6] A REINVESTIGATION OF STRUCTURE OF SODIUM METASILICATE NA2SIO3 [J].

MCDONALD, WS ;

CRUICKSHANK, DW .

ACTA CRYSTALLOGRAPHICA, 1967, 22 :37-+

[7] EXPERIMENTAL AND THEORETICAL-STUDIES OF CU2O SOLAR-CELLS [J].

OLSEN, LC ;

ADDIS, FW ;

MILLER, W .

SOLAR CELLS, 1982, 7 (03) :247-279

[8] EXPLANATION FOR LOW-EFFICIENCY CU2O SCHOTTKY-BARRIER SOLAR-CELLS [J].

OLSEN, LC ;

BOHARA, RC ;

URIE, MW .

APPLIED PHYSICS LETTERS, 1979, 34 (01) :47-49

[9] Electrical and optical properties of copper oxide films prepared by reactive RF magnetron sputtering [J].

Parretta, A ;

Jayaraj, MK ;

DiNocera, A ;

Loreti, S ;

Quercia, L ;

Agati, A .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1996, 155 (02) :399-404

[10] PHOTOELECTRIC PROPERTIES OF CUPROUS-OXIDE [J].

POLLACK, GP ;

TRIVICH, D .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (01) :163-172

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