A model for growth directional features in silicon nanowires

被引:39
作者
Tan, TY [1 ]
Lee, ST
Gösele, U
机构
[1] Duke Univ, Dept Mech Engn & Mat Sci, Durham, NC 27708 USA
[2] City Univ Hong Kong, COSDAF, Hong Kong, Hong Kong, Peoples R China
[3] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China
[4] Max Planck Inst Microstruct Phys, D-06120 Halle Saale, Germany
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2002年 / 74卷 / 03期
关键词
D O I
10.1007/s003390101133
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Long silicon nanowires (SiNWs) grown by laser ablation or by thermal evaporation of monoxide source materials are primarily oriented in the <112> direction, and some in the <110> direction, but rarely in the <100> or <111> directions. We propose a model to explain these SiNW growth directional features. The model consists of two parts. Part one is concerned with mechanism-based criteria and part two with applying these criteria to explain the experimental results. Four criteria are considered: (i) the stability of a Si atom occupying a surface site; (ii) the Si {111}ace stability in the presence of oxygen; (iii) the stepped Si {111} surface layer lateral growth process; and (iv) the effect of dislocations in providing perpetuating {111} steps to facilitate SiNW growth. Analyses of SiNW growth in accordance with these criteria showed that <112> and <110> are the preferred SiNW growth directions, and that <111> and <100> are not.
引用
收藏
页码:423 / 432
页数:10
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