Self-oscillating mode for frequency modulation noncontact atomic force microscopy

被引:20
作者
Giessibl, FJ [1 ]
Tortonese, M [1 ]
机构
[1] PARK SCI INSTRUMENTS,SUNNYVALE,CA 94089
关键词
D O I
10.1063/1.118910
中图分类号
O59 [应用物理学];
学科分类号
摘要
Frequency modulation atomic force microscopy (FM-AFM) has made imaging of surfaces in ultrahigh vacuum with atomic resolution possible. Here, we demonstrate a new approach which simplifies the implementation of FM-AFM considerably and enhances force sensitivity by directly exciting the cantilever with the thermal effects involved in the deflection measurement process. This approach reduces the mechanically oscillating mass by 6 to 8 orders of magnitude as compared to conventional FM-AFM, because external actuators and oscillating cantilever mounts are not needed. Avoiding external actuators allows the use of cantilevers with very high oscillation frequencies, which results in improved force sensitivity. Further, the implementation and operation of this new technique is significantly simplified, because external actuator, bandpass filter, and phase shifter are eliminated. (C) 1997 American Institute of Physics.
引用
收藏
页码:2529 / 2531
页数:3
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