OBSERVATION OF 7X7 RECONSTRUCTED STRUCTURE ON THE SILICON (111) SURFACE USING ULTRAHIGH-VACUUM NONCONTACT ATOMIC-FORCE MICROSCOPY

被引:237
作者
KITAMURA, S
IWATSUKI, M
机构
[1] JEOL Ltd, Akishima, Tokyo, 196
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1995年 / 34卷 / 1B期
关键词
AFM; STM; UHV; NONCONTACT; SI(111)7 X 7; ATOMIC RESOLUTION; FORCE GRADIENT; FM DETECTION; STIFF CANTILEVER;
D O I
10.1143/JJAP.34.L145
中图分类号
O59 [应用物理学];
学科分类号
摘要
Unlike ultrahigh vacuum (UHV) scanning tunneling microscopy (STM), the effectiveness of UHV in UHV atomic force microscopy (AFM) has not been verified. Intensive interaction between tip and sample in UHV often damages the sample surface in the contact mode. Although noncontact (NC) AFM is effective in protecting the sample surface, it has failed to provide atomic-level resolution. We used a stiff silicon cantilever (similar to 40 N/m) capable of STM imaging, and succeeded in obtaining the first atomic-resolution images of Si(111)7 x 7 reconstruction in NC AFM at a tip-sample distance almost equal to that for STM imaging.
引用
收藏
页码:L145 / L148
页数:4
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