Pyroelectric thin-film sensor array

被引：121

作者：

Kohli, M ^{[1
]}

Wuethrich, C ^{[1
]}

Brooks, K ^{[1
]}

Willing, B ^{[1
]}

Forster, M ^{[1
]}

Muralt, P ^{[1
]}

Setter, N ^{[1
]}

Ryser, P ^{[1
]}

机构：

[1] CERBERUS AG,CH-8708 MANNEDORF,SWITZERLAND

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 60卷 / 1-3期

关键词：

ferroelectric materials; pyroelectric detectors; sensor arrays; thin-film sensors;

D O I：

10.1016/S0924-4247(97)01484-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Pyroelectric thin-film point detectors and 1 x 12 arrays have been fabricated and characterized. They consist of sol-gel-deposited PZT thin-film elements on micromachined Si3N4/SiO2 membranes. The measured current and voltage response as a function of modulation frequency of a 1 x 12 array element is compared with finite-element calculations. Voltage responsivities of almost 3000 V W-1 in vacuum and 800 V W-1 in air have been achieved for 0.4 mm x 0.9 mm elements. Some point detectors have been completely packaged and correct operation in a movement detection system has been demonstrated.

引用

页码：147 / 153

页数：7

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