Optically polished surfaces parallel to the (220) lattice planes of silicon monocrystals

被引：6

作者：

Bergamin, A

Cavagnero, G

Mana, G

Massa, E

Zosi, G

机构：

[1] CNR, Ist Metrol G Colonetti, I-10135 Turin, Italy

[2] Univ Turin, Dipartimento Sci Gen, I-10125 Turin, Italy

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1999年 / 10卷 / 06期

关键词：

angle; flatness; x-ray diffraction; crystal cutting; optical polishing; standards and calibration; x-ray optics; x-ray interferometry;

D O I：

10.1088/0957-0233/10/6/321

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An apparatus whereby silicon monocrystals, such as those used in x-ray optics, can be cut and optically polished accurately parallel to known lattice planes is described. A parallelism to within 10 mu rad has been obtained.

引用

页码：549 / 553

页数：5

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