On the use of grazing-incidence small-angle X-ray scattering (GISAXS) in the morphological study of ion-implanted materials

被引：6

作者：

d'Acapito, F

Maurizio, C

Gonella, F

Cattaruzza, E

Mattei, G

Mondelli, C

Longo, A

Martorana, A

机构：

[1] European Synchrotron Radiat Facil, INFM, OGG, GILDA CRG, F-38043 Grenoble, France

[2] Univ Venice, Dipartimento Chim Fis, I-30123 Venice, Italy

[3] Univ Padua, Dipartimento Fis, I-35131 Padua, Italy

[4] INFM, OGG, ILL, F-38042 Grenoble, France

[5] CNR, ICTPN, I-90146 Palermo, Italy

[6] Univ Palermo, Dipartimento Chim Inorgan, I-90128 Palermo, Italy

来源：

JOURNAL OF SYNCHROTRON RADIATION | 2004年 / 11卷

关键词：

grazing-incidence small-angle X-ray scattering; ion implantation; metallic nanoparticles; glass-nanocluster composites; small-angle neutron scattering;

D O I：

10.1107/S0909049504002523

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Grazing-incidence small-angle X-ray scattering has become a widely used technique for the morphological analysis of surface systems. Here it is show how this technique can be applied to a buried system, like metallic clusters in glass obtained by ion implantation. The optimization of the data-collection geometry is described as well as the details of the quantitative data analysis. An experimental example on Cu+Au-implanted glasses shows the potentiality of the technique.

引用

页码：272 / 277

页数：6

共 41 条

[1] Semiconductor clusters, nanocrystals, and quantum dots [J].