Printed Sub-100 nm Polymer-Derived Ceramic Structures

被引：18

作者：

Duong, Binh ^{[1
]}

Gangopadhyay, Palash ^{[2
]}

Brent, Josh ^{[2
]}

Seraphin, Supapan ^{[3
]}

Loutfy, Raouf O. ^{[4
]}

Peyghambarian, Nasser ^{[2
]}

Thomas, Jayan ^{[1
,5
,6
]}

机构：

[1] Univ Cent Florida, NanoSci Technol Ctr, Orlando, FL 32826 USA

[2] Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA

[3] Univ Arizona, Dept Mat Sci & Engn, Tucson, AZ 85721 USA

[4] Mat & Electrochem Res Corp, Tucson, AZ 85706 USA

[5] Univ Cent Florida, CREOL, Coll Opt & Photon, Orlando, FL 32826 USA

[6] Univ Cent Florida, Dept Mat Sci & Engn, Orlando, FL 32826 USA

来源：

ACS APPLIED MATERIALS & INTERFACES | 2013年 / 5卷 / 09期

基金：

美国国家科学基金会;

关键词：

nanostructured ceramics; nanoimprinting; sub-100 nm ceramic structures; polymer-derived ceramics; SNAP technique; polyureasilazane; PRECERAMIC POLYMERS; NANOSTRUCTURES; FABRICATION; FILMS; SICN;

D O I：

10.1021/am400587z

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We proposed an unconventional fabrication technique called spin-on nanoprinting (SNAP) to generate and transfer sub-100 nm preceramic polymer patterns onto flexible and rigid substrates. The dimensions of printed nanostructures are almost the same as those of the mold, since the ceramic precursor used is a liquid. The printed patterns can be used as a replica for printing second-generation structures using other polymeric materials or they can be further converted to desirable ceramic structures, which are very attractive for high-temperature and harsh environment applications. SNAP is an inexpensive parallel process and requires no special equipment for operation.

引用

页码：3894 / 3899

页数：6

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