CMOS integrated pressure sensor optimization using electrical network simulator-FEM tool coupling

被引：3

作者：

Götz, A ^{[1
]}

Krassow, H ^{[1
]}

Zabala, M ^{[1
]}

Santander, J ^{[1
]}

Cané, C ^{[1
]}

机构：

[1] CSIC, CNM, Ctr Nacl Microelect, Bellaterra 08193, Barcelona, Spain

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1999年 / 9卷 / 02期

关键词：

CMOS integrated circuits - Computer simulation - Finite element method - Integrated circuit manufacture - Microsensors - Optimization - Variable frequency oscillators;

D O I：

10.1088/0960-1317/9/2/002

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The electrical network simulator HSPICE and the FEM (finite element method) program ANSYS were coupled. The coupled programs can be used for the effective design of many types of microsystem. The coupling permits the optimization of geometrical, mechanical or electrical design parameters of a monolithically integrated sensor at the same time. For the demonstration of the usefulness of the coupling, a gauge pressure sensor fabricated with an on-chip integrated VCO (voltage controlled oscillator) was simulated and the design was optimized using ANSYS optimization tools.

引用

页码：109 / 112

页数：4

共 5 条

[1] MICROMACHINED BEAM-DIAPHRAGM STRUCTURE IMPROVES PERFORMANCES OF PRESSURE TRANSDUCER [J].

BAO, MH ;

YU, LZ ;

WANG, Y .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :137-141

[2] A TECHNOLOGY FOR THE MONOLITHIC FABRICATION OF A PRESSURE SENSOR AND RELATED CIRCUITRY [J].

CANE, C ;

CAMPABADAL, F ;

ESTEVE, J ;

LOZANO, M ;

GOTZ, A ;

SANTANDER, J ;

BURRER, C ;

PLAZA, JA ;

PAHUN, L ;

MARCO, S .

SENSORS AND ACTUATORS A-PHYSICAL, 1995, 46 (1-3) :133-136

[3]

ECCARDT PC, 1996, MICRO SYSTEM TECHNOL, P145

[4]

HERBERT DB, 1992, IEEE CIRCUITS DEVICE, V1, P11

[5]

KRASSOW H, 1998, P MSM, P329

← 1 →