Characterization and growth of high quality ZnTe epilayers by hot-wall epitaxy

被引:24
作者
Nam, S
Rhee, J
O, BS
Lee, KS
Choi, YD
Jeon, GN
Lee, CH
机构
[1] CHUNGNAM NATL UNIV,DEPT PHYS,TAEJON 305764,SOUTH KOREA
[2] MOKWON UNIV,DEPT PHYS,TAEJON 301729,SOUTH KOREA
[3] JEONBUK NATL UNIV,DEPT PHYS,JEONJU 561756,SOUTH KOREA
[4] JEONBUK NATL UNIV,SEMICOND PHYS RES CTR,JEONJU 561756,SOUTH KOREA
关键词
hot-wall epitaxy; ZnTe; pre-heating; DCRC; photoluminescence;
D O I
10.1016/S0022-0248(97)00193-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
ZnTe epilayers of high quality have been grown by hot-wall epitaxy and their characteristics have been investigated. By Rutherford backscattering, the atomic ratio of Zn:Te in the epilayers was found to be almost constant over the wide range of the growth temperature. It was found that the quality of the films depended on the pre-heating temperature. The best Value of the FWHM of the double crystal rocking curve, 93 arcsec, was obtained at the pre-heating temperature of 590-610 degrees C. The PL spectrum with the strong free exciton peaks and no oxygen-bound exciton peaks showed the high quality of the films. From the PL spectrum and the lattice constants, it could be concluded that a tensile strain remained in the ZnTe/GaAs epilayers.
引用
收藏
页码:47 / 53
页数:7
相关论文
共 22 条
[1]   X-RAY ROCKING CURVE CHARACTERIZATION OF ZNTE LAYERS GROWN ON GAAS BY HOT-WALL EPITAXY [J].
ABRAMOF, E ;
HINGERL, K ;
PESEK, A ;
SITTER, H .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1991, 6 (9A) :A80-A82
[2]  
[Anonymous], 1982, NEW SER
[3]   ATOMIC LAYER EPITAXIAL-GROWTH OF ZNSE, ZNTE, AND ZNSE-ZNTE STRAINED-LAYER SUPERLATTICES [J].
DOSHO, S ;
TAKEMURA, Y ;
KONAGAI, M ;
TAKAHASHI, K .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (06) :2597-2602
[4]   FABRICATION AND PHOTOLUMINESCENCE PROPERTIES OF ZNTE AND CDZNTE FILMS BY LOW-PRESSURE METALORGANIC CHEMICAL-VAPOR DEPOSITION [J].
EKAWA, M ;
KAWAKAMI, Y ;
TAGUCHI, T ;
HIRAKI, A .
JOURNAL OF CRYSTAL GROWTH, 1988, 93 (1-4) :667-672
[5]   ZNTE/GAAS(001) - GROWTH MODE AND STRAIN EVOLUTION DURING THE EARLY STAGES OF MOLECULAR-BEAM-EPITAXY HETEROEPITAXIAL GROWTH [J].
ETGENS, VH ;
SAUVAGESIMKIN, M ;
PINCHAUX, R ;
MASSIES, J ;
JEDRECY, N ;
WALDHAUER, A ;
TATARENKO, S ;
JOUNEAU, PH .
PHYSICAL REVIEW B, 1993, 47 (16) :10607-10612
[6]   PROPERTIES OF ZNTE-ZNSE AND -ZNS SUPERLATTICES PREPARED BY HOT WALL EPITAXY [J].
FUJIYASU, H ;
MOCHIZUKI, K ;
YAMAZAKI, Y ;
AOKI, M ;
SASAKI, A ;
KUWABARA, H ;
NAKANISHI, Y ;
SHIMAOKA, G .
SURFACE SCIENCE, 1986, 174 (1-3) :543-547
[7]  
KUDLEK G, 1992, J CRYST GROWTH, V117, P290, DOI 10.1016/0022-0248(92)90762-8
[8]   PHOTOLUMINESCENCE AND EXCITATION SPECTROSCOPY OF ZNTE/GAAS EPILAYERS GROWN BY HOT-WALL EPITAXY [J].
KUDLEK, G ;
PRESSER, N ;
GUTOWSKI, J ;
HINGERL, K ;
ABRAMOF, E ;
SITTER, H .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1991, 6 (9A) :A90-A95
[9]   LATTICE STRAIN NEAR INTERFACE OF MBE-GROWN ZNTE ON GAAS [J].
KUMAZAKI, K ;
IIDA, F ;
OHNO, K ;
HATANO, K ;
IMAI, K .
JOURNAL OF CRYSTAL GROWTH, 1992, 117 (1-4) :285-289
[10]   CHARACTERIZATION OF HOT WALL EPITAXY GROWN ZNTE LAYERS [J].
LINK, P ;
SCHMIDT, T ;
BAUER, S ;
WAGNER, HP ;
LEIDERER, H ;
GEBHARDT, W .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (08) :3730-3734