Direct metallization of nickel on polymeric template patterns for fabrication of copper circuits on glass substrates

被引:21
作者
Matsumura, Yasufumi [2 ,3 ]
Enomoto, Yasushi [3 ]
Sugiyama, Masanori [2 ]
Akamatsu, Kensuke [1 ]
Nawafune, Hidemi [1 ]
机构
[1] Konan Univ, Fac Sci & Engn, Kobe, Hyogo 6588501, Japan
[2] Konan Univ, Grad Sch Sci, Kobe, Hyogo 6588501, Japan
[3] Nippon Steel Chem Co Ltd, PWB Mat Labs, Chiba 2920835, Japan
关键词
D O I
10.1039/b808267g
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We demonstrate a chemical route to depositing nickel granular layer patterns using ion-doped precursor templates, which can be used as adhesive interlayers for fabrication of copper circuit patterns on glass substrates. The poly(amic acid) templates were first dispensed from solution onto the glass surface using a fine-precision dispenser, followed by Ni(2+) ion doping through selective ion exchange reaction. The reduction treatment using aqueous NaBH(4) solution allowed the formation of a nickel granular layer on the poly(amic acid) surface, which could catalyze subsequent electrodeposition of copper. The resulting copper/nickel/polyimide-layered structure showed good adhesion with the glass substrate. This work can benefit the understanding of the growth process of metallic thin films via the direct metallization process and provide important experimental data for developing novel fabrication processes for copper circuit patterns on glass substrates.
引用
收藏
页码:5078 / 5082
页数:5
相关论文
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