Selective electroless metal deposition using microcontact printing of phosphine-phosphonic acid inks

被引:28
作者
Carmichael, TB [1 ]
Vella, SJ [1 ]
Afzali, A [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
关键词
D O I
10.1021/la049870a
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We report a low-cost approach to selectively deposit films of nickel and copper on glass substrates. Our approach uses microcontact printing of organic inks containing phosphonic acid groups to bind the ink to a glass substrate and phosphine groups to bind a colloidal catalyst that initiates electroless metallization. We demonstrate this procedure by fabricating patterned nickel and copper films with areas as large as 15 cm(2) and minimum feature sizes of similar to2 mum. We present studies on the use of two ink types, an oligomer and a bifunctional molecule, and demonstrate that pattern quality and adhesion of the metallized films depends on the molecular weight of the ink and the ratio of phosphine and phosphonic acid groups.
引用
收藏
页码:5593 / 5598
页数:6
相关论文
共 36 条
  • [1] ALLEN J, 1974, Patent No. 3847997
  • [2] Patterning indium tin oxide and indium zinc oxide using microcontact printing and wet etching
    Breen, TL
    Fryer, PM
    Nunes, RW
    Rothwell, ME
    [J]. LANGMUIR, 2002, 18 (01) : 194 - 197
  • [3] Large area submicrometer contact printing using a contact aligner
    Burgin, T
    Choong, VE
    Maracas, G
    [J]. LANGMUIR, 2000, 16 (12) : 5371 - 5375
  • [4] DEEP ULTRAVIOLET LITHOGRAPHY OF MONOLAYER FILMS WITH SELECTIVE ELECTROLESS METALLIZATION
    CALVERT, JM
    CHEN, MS
    DULCEY, CS
    GEORGER, JH
    PECKERAR, MC
    SCHNUR, JM
    SCHOEN, PE
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (06) : 1677 - 1680
  • [5] ELECTROLESS CU FOR VLSI
    CHO, JSH
    KANG, HK
    WONG, SS
    SHACHAMDIAMAND, Y
    [J]. MRS BULLETIN, 1993, 18 (06) : 31 - 38
  • [6] CHEMISTRY OF PALLADIUM-TIN COLLOID SENSITIZING PROCESSES
    COHEN, RL
    MEEK, RL
    [J]. JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1976, 55 (01) : 156 - 162
  • [7] GENERATIVE AND STABILIZING PROCESSES IN TIN-PALLADIUM SOLS AND PALLADIUM SOL SENSITIZERS
    COHEN, RL
    WEST, KW
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (04) : 502 - 508
  • [8] Transport mechanisms of alkanethiols during microcontact printing on gold
    Delamarche, E
    Schmid, H
    Bietsch, A
    Larsen, NB
    Rothuizen, H
    Michel, B
    Biebuyck, H
    [J]. JOURNAL OF PHYSICAL CHEMISTRY B, 1998, 102 (18): : 3324 - 3334
  • [9] SOME REACTIONS OF PHOSPHINE COMPLEXES OF PLATINUM(0) AND PALLADIUM(0) WITH ACIDIC SOLVENTS - PHOSPHORUS-31 NUCLEAR MAGNETIC-RESONANCE STUDY
    DILLON, KB
    WADDINGTON, TC
    YOUNGER, D
    [J]. JOURNAL OF THE CHEMICAL SOCIETY-DALTON TRANSACTIONS, 1975, (09): : 790 - 794
  • [10] COVALENT BINDING OF PD CATALYSTS TO LIGATING SELF-ASSEMBLED MONOLAYER FILMS FOR SELECTIVE ELECTROLESS METAL-DEPOSITION
    DRESSICK, WJ
    DULCEY, CS
    GEORGER, JH
    CALABRESE, GS
    CALVERT, JM
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1994, 141 (01) : 210 - 220