Molecular beam epitaxy growth of PbSe on BaF2-coated Si(111) and observation of the PbSe growth interface

被引:31
作者
Wu, HZ [1 ]
Fang, XM
Salas, R
McAlister, D
McCann, PJ
机构
[1] Univ Oklahoma, Sch Elect & Comp Engn, Norman, OK 73019 USA
[2] Univ Oklahoma, Lab Elect Properties Mat, Norman, OK 73019 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 03期
关键词
D O I
10.1116/1.590736
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Epitaxial growth of PbSe/BaF2/CaF2 heterostructures was carried out by molecular beam epitaxy (MBE) on Si(lll) wafers. Successful transfer of 3-mu m-thick PbSe epilayers was accomplished by bonding the MBE-grown samples face down to polished copper plates followed by the removal of the silicon substrate by dissolving the BaF2 buffer layer in water. High-resolution x-ray diffraction measurements demonstrated that the PbSe epilayer maintained high-crystalline quality after transfer. In addition, optical Nomarski characterization of the exposed growth interface showed sets of parallel straight step lines consistent with glide of dislocations in the primary {100}[110] glide system. Such features are evidence of the large thermal expansion mismatch strain that occurred in these layers. (C) 1999 American Vacuum Society. [S0734-211X(99)03803-2].
引用
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页码:1263 / 1266
页数:4
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