Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching

被引：123

作者：

Maselli, Valeria ^{[1
]}

Osellame, Roberto

Cerullo, Giulio

Ramponi, Roberta

Laporta, Paolo

Magagnin, Luca

Cavallotti, Pietro Luigi

机构：

[1] Politecn Milan, Ist Nazl Fis Nucl, Dipartimento Fis, Ist Foton & Nanotecnol,CNR, I-20133 Milan, Italy

[2] Politecn Milan, Dipartimento Chim Mat & Ingn Chim, I-20133 Milan, Italy

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 19期

关键词：

D O I：

10.1063/1.2203335

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on the fabrication of microfluidic channels in fused silica using femtosecond laser irradiation followed by chemical etching. Using an astigmatically shaped beam, we achieve microchannels with circular cross section and length up to 1.5 mm. We use the same femtosecond laser, with different irradiation parameters, to fabricate high quality optical waveguides on the same substrate. The integration of microchannels and waveguides will enable a forthcoming class of biophotonic sensors. (c) 2006 American Institute of Physics.

引用

页数：3

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