Transparent conducting zinc oxide thin film prepared by off-axis rf magnetron sputtering

被引：99

作者：

Jayaraj, MK ^{[1
]}

Antony, A ^{[1
]}

Ramachandran, M ^{[1
]}

机构：

[1] Cochin Univ Sci & Technol, Dept Phys, Kochi 682022, Kerala, India

来源：

BULLETIN OF MATERIALS SCIENCE | 2002年 / 25卷 / 03期

关键词：

transparent conductors; ZnO thin films; photovoltaics;

D O I：

10.1007/BF02711158

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Highly conducting and transparent ZnO : Al thin films were grown by off-axis rf magnetron sputtering on amorphous silica substrates without any post-deposition annealing. The electrical and optical properties of the films deposited at various substrate temperatures and target to substrate distances were investigated in detail. Optimized ZnO : Al films have conductivity of 2200 S cm(-1) and average transmission in the visible range is higher than 85%. The conductivity and mobility show very little temperature dependence.

引用

页码：227 / 230

页数：4

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