Leveling of 200 nm features by organic additives

被引：80

作者：

Kelly, JJ ^{[1
]}

West, AC

机构：

[1] Columbia Univ, Dept Mat Sci & Met Engn, New York, NY 10027 USA

[2] Columbia Univ, Dept Chem Engn, New York, NY 10027 USA

来源：

ELECTROCHEMICAL AND SOLID STATE LETTERS | 1999年 / 2卷 / 11期

关键词：

D O I：

10.1149/1.1390904

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The leveling of 200 nm trenches by an acid-copper electrolyte with polyethylene glycol (PEG), Cl-, bis(3-sulfopropyl) disulfide (SPS), and Janus Green B (JGB) was shown to be superior to leveling in electrolytes with combinations of only two or three of the additives. The leveling performance of an electrolyte with all four additives is dependent on both current density and JGB concentration. The leveling of the 200 nm features appears to be consistent with some, but not all, aspects of previous experiments on a 100 mu m scale. (C) 1999 The Electrochemical Society. S1099-0062(99)05-052-X. All rights reserved.

引用

页码：561 / 563

页数：3

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