STM study of the C-induced Si(100)-c(4X4) reconstruction -: art. no. 115321

被引:25
作者
Jemander, ST [1 ]
Zhang, HM [1 ]
Uhrberg, RIG [1 ]
Hansson, GV [1 ]
机构
[1] Linkoping Univ, Dept Phys & Measurement Technol, S-58183 Linkoping, Sweden
来源
PHYSICAL REVIEW B | 2002年 / 65卷 / 11期
关键词
D O I
10.1103/PhysRevB.65.115321
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report a direct and reliable way to produce the Si(100)-c(4x4) reconstruction by submonolayer deposition from a SiC source and subsequent annealing. Auger electron spectroscopy, low-energy electron diffraction, and scanning tunneling microscopy (STM) investigations reveal that a C amount equivalent to 0.07 monolayers (ML's) is sufficient to obtain full coverage of the c(4x4) reconstruction. A deposition of 0.035 ML's C produces a c(4x4) coverage of only 19%, indicating that C is not only present in the c(4x4) areas, but also in the 231 areas. There is not enough C to make it a regular part of the c(4x4) reconstruction and we therefore conclude that the c(4x4) reconstruction is strain induced. We find that a combination of the mixed ad-dimer and buckled ad-dimer models explains all main features observed in the STM images. Images of freshly prepared c(4x4) surfaces exhibit a decoration of approximately 50% of the unit cells, which is attributed to perpendicular ad-dimers. Long exposures (>20 h) to the UHV background gas quench these features and the c(4x4) reconstruction appears as if more homogeneous.
引用
收藏
页码:1 / 8
页数:8
相关论文
共 52 条
[1]   Photoluminescence of carbon-induced Ge islands in silicon [J].
Beyer, A ;
Leifeld, O ;
Müller, E ;
Stutz, S ;
Sigg, H ;
Grützmacher, D .
THIN SOLID FILMS, 2000, 380 (1-2) :246-248
[2]   The influence of carbon on the surface morphology of Si(100) and on subsequent Ge island formation [J].
Butz, R ;
Lüth, H .
THIN SOLID FILMS, 1998, 336 (1-2) :69-72
[3]   The surface morphology of Si (100) after carbon deposition [J].
Butz, R ;
Luth, H .
SURFACE SCIENCE, 1998, 411 (1-2) :61-69
[4]   Atomic-level spatial distributions of dopants on silicon surfaces: Toward a microscopic understanding of surface chemical reactivity [J].
Hamers, RJ ;
Wang, YJ ;
Shan, J .
APPLIED SURFACE SCIENCE, 1996, 107 :25-34
[5]   SI(100)-C(4X4) METASTABLE SURFACE OBSERVED BY SCANNING TUNNELING MICROSCOPY [J].
IDE, T ;
MIZUTANI, T .
PHYSICAL REVIEW B, 1992, 45 (03) :1447-1449
[6]   LOW-TEMPERATURE SURFACE CLEANING OF SILICON AND ITS APPLICATION TO SILICON MBE [J].
ISHIZAKA, A ;
SHIRAKI, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (04) :666-671
[7]  
JEMANDER T, 2001, THESIS LINKOPINGS U
[8]   Characterization of strained Si/Si1-yCy structures prepared by molecular beam epitaxy [J].
Joelsson, KB ;
Ni, WX ;
Pozina, G ;
Pettersson, LAA ;
Hallberg, T ;
Monemar, B ;
Hansson, GV .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (03) :1621-1626
[9]   THE MESOSCOPIC AND MICROSCOPIC STRUCTURAL CONSEQUENCES FROM DECOMPOSITION AND DESORPTION OF ULTRATHIN OXIDE LAYERS ON SI(100) STUDIED BY SCANNING-TUNNELING-MICROSCOPY [J].
JOHNSON, KE ;
WU, PK ;
SANDER, M ;
ENGEL, T .
SURFACE SCIENCE, 1993, 290 (03) :213-231
[10]   Surface reconstructions of the Si(100)-Ge system [J].
Kahng, SJ ;
Park, JY ;
Kuk, Y .
SURFACE SCIENCE, 1999, 440 (03) :351-356