Remote RF powering system for wireless MEMS strain sensors

被引:20
作者
Chaimanonart, N [1 ]
Young, DJ [1 ]
机构
[1] Case Western Reserve Univ, Dept Elect Engn & Comp Sci, Cleveland, OH 44106 USA
关键词
inductive coupling; microelectromechanical systems (MEMS) microsystems; radio frequency (RF) powering system; strain sensors; telemetry;
D O I
10.1109/JSEN.2006.870158
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A reliable remote radio frequency (RF) powering system is developed for industrial wireless microelectromechanical systems (MEMS) strain-sensing applications. The prototype system is insensitive to mechanical rotation and produces a stable DC voltage of 2.8 V with a 2-mA current supply capability from a 50-MHz RF power source with a power conversion efficiency of 11%. An improved efficiency can be expected with an optimized power transmitter design. The CMOS power converter electronics are fabricated in a 1.5-mu m CMOS process occupying an area of approximately 1 x 1 mm. The achieved DC power is adequate for supplying a high-performance wireless MEMS strain-sensing system.
引用
收藏
页码:484 / 489
页数:6
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