Emission of secondary particles from metals and insulators at impact of slow highly charged ions

被引:47
作者
Schenkel, T [1 ]
Barnes, AV [1 ]
Briere, MA [1 ]
Hamza, A [1 ]
vonWittenau, AS [1 ]
Schneider, DH [1 ]
机构
[1] UNIV FRANKFURT,INST KERNPHYS,D-60486 FRANKFURT,GERMANY
关键词
D O I
10.1016/S0168-583X(96)00930-5
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The emission of secondary electrons and ions from clean Au, CxHy-Au and SiO2 surfaces at impact of slow (upsilon approximate to 0.3 upsilon(Bohr)) ions has been measured as a function of incident ion charge for 1 + less than or equal to q less than or equal to 75 +. Electron yields from thermal silicon dioxide films (150 nm on Si) are found to be lower than those from Au and CxHy-Au for q > 3 +. Yields of negative secondary ions from SiO2 and CxHy-Au were recorded in parallel with electron emission data and exhibit a q(n), n approximate to 4, dependency on incident ion charge. A direct comparison of collisional and electronic contributions to secondary ion production from SiO2 films using a beam of charge state equilibrated Xe-q=qeq (at 2.75 keV/u) shows positive and negative secondary ion yield increases with incident ion charge of > 400. Results are discussed in relation to key signatures of electronic sputtering by Coulomb explosions.
引用
收藏
页码:153 / 158
页数:6
相关论文
共 40 条
[31]   TOTAL MOLECULAR YIELDS FOR FAST HEAVY-ION INDUCED DESORPTION OF BIOMOLECULES [J].
SALEHPOUR, M ;
HAKANSSON, P ;
SUNDQVIST, B ;
WIDDIYASEKERA, S .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 13 (1-3) :278-282
[32]  
SCHENKEL T, UNPUB
[33]  
SCHENKEL T, 1995, P 43 ASMS C MASS SPE
[34]   MEASUREMENT OF NEGATIVE-ION AND NEGATIVE-CLUSTER SPUTTERING WITH HIGHLY-CHARGED HEAVY-IONS [J].
SCHIWIETZ, G ;
BRIERE, M ;
SCHNEIDER, D ;
MCDONALD, J ;
CUNNINGHAM, C .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 100 (01) :47-54
[35]   Investigations of the interactions of highest charge state ions with surfaces [J].
Schneider, DHG ;
Briere, MA .
PHYSICA SCRIPTA, 1996, 53 (02) :228-242
[36]   SYSTEMATICS OF EQUILIBRIUM CHARGE-DISTRIBUTIONS OF IONS PASSING THROUGH A CARBON FOIL OVER THE RANGES Z = 4-92 AND E = 0.02-6 MEV/U [J].
SHIMA, K ;
KUNO, N ;
YAMANOUCHI, M .
PHYSICAL REVIEW A, 1989, 40 (07) :3557-3570
[37]   ATOMIC-FORCE-MICROSCOPY OBSERVATIONS OF TRACKS INDUCED BY SWIFT KR IONS IN MICA [J].
THIBAUDAU, F ;
COUSTY, J ;
BALANZAT, E ;
BOUFFARD, S .
PHYSICAL REVIEW LETTERS, 1991, 67 (12) :1582-1585
[38]   FAST HEAVY-ION INDUCED DESORPTION [J].
WIEN, K .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1989, 109 (1-4) :137-167
[39]   Interaction of slow multicharged ions with solid surfaces: Current concepts and new information on slow electron emission [J].
Winter, HP ;
Vana, M ;
Lemell, C ;
Aumayr, F .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 115 (1-4) :224-232
[40]   The formation of clusters during ion induced sputtering of metals [J].
Wucher, A ;
Wahl, M .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 115 (1-4) :581-589