Pick-and-place nanomanipulation using microfabricated grippers

被引:90
作者
Molhave, Kristian
Wich, Thomas
Kortschack, Axel [1 ]
Boggild, Peter
机构
[1] Tech Univ Denmark, Dept Micro & Nanotechnol, MIC, DK-2800 Lyngby, Denmark
[2] Carl von Ossietzky Univ Oldenburg, Abt Mikrorobot & Regelungstech, D-26129 Oldenburg, Germany
关键词
D O I
10.1088/0957-4484/17/10/002
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Microfabricated grippers could be useful for the manipulation of nanoscopic and microscopic samples. A survey is presented of the force requirements for a microgripper to complete pick-and-place nanomanipulation tasks. We then demonstrate in situ pick-and-place operations of nanowires inside a scanning electron microscope using microfabricated electrostatically actuated grippers, and compare the theoretically estimated force requirements with the results of experimental tests of picking up nanowires to evaluate how grippers and strategies for nanomanipulation can be optimized.
引用
收藏
页码:2434 / 2441
页数:8
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