Electrothermally activated SU-8 microgripper for single cell manipulation in solution

被引：291

作者：

Chronis, N ^{[1
]}

Lee, LP ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Bioengn, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2005年 / 14卷 / 04期

关键词：

polymer MEMS; polymer microgripper; single cell manipulation; SU-8; actuators;

D O I：

10.1109/JMEMS.2005.845445

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The development of a SU-8-based microgripper that can operate in physiological ionic solutions is presented. The electrothermally activated polymer gripper consists of two "hot-and-cold-arm" actuators that are fabricated in a two-mask surface micromachining process. The high thermal expansion coefficient of SU-8 (52 ppm/degrees C) compared to silicon and metals, allows the actuation of the microgripper with small average temperature elevations (10 - 32 degrees C) at low voltages (1-2 V). The polymer microgripper can be used for the manipulation of single cells and other biological species in solution with minimal undesired interactions.

引用

页码：857 / 863

页数：7

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