Electrical and optical property enhancement in multilayered sol-gel-deposited SnO2 films

被引:45
作者
Chatelon, JP [1 ]
Terrier, C [1 ]
Roger, JA [1 ]
机构
[1] Univ Lyon 1, UMR 5586, Dept Phys Mat, F-69622 Villeurbanne, France
关键词
D O I
10.1088/0268-1242/14/7/310
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
When prepared by the sol-gel dip-coating technique, doped tin oxide films need several superimposed layers to reach the expected low sheet resistance. In this paper we show that successive depositions increase the uniformity and homogeneity of multi-layered sol-gel tin oxide alms. The final thickness is always found to be lower than a multiple of the initial first layer thickness, indicating that densification occurs. A strong improvement of physical properties is jointly observed in this multilayered configuration. All parameters (atomic density, refractive index, electrical resistivity, optical transmission and reflectivity) evolve towards bulk material values. This is explained by the fact that the sol, in which is dipped the substrate, fills in the pores or cracks remaining in the previously deposited layers. The quality of the sol-gel tin oxide stacked deposits obtained in such a way is evidenced by the M-line spectroscopy experiments presented in this paper. It is shown that multilayered coatings are able to guide light over some millimetres.
引用
收藏
页码:642 / 647
页数:6
相关论文
共 17 条
[1]   Electrical properties and topography of SnO2 thin films prepared by reactive sputtering [J].
Brousseau, JL ;
Bourque, H ;
Tessier, A ;
Leblanc, RM .
APPLIED SURFACE SCIENCE, 1997, 108 (03) :351-358
[2]  
CAILLAUD F, 1992, THIN SOLID FILMS, V208
[3]   Influence of elaboration parameters on the properties of tin oxide films obtained by the sol-gel process [J].
Chatelon, JP ;
Terrier, C ;
Roger, JA .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1997, 10 (01) :55-66
[4]   MORPHOLOGY OF SNO2 THIN-FILMS OBTAINED BY THE SOL-GEL TECHNIQUE [J].
CHATELON, JP ;
TERRIER, C ;
BERNSTEIN, E ;
BERJOAN, R ;
ROGER, JA .
THIN SOLID FILMS, 1994, 247 (02) :162-168
[5]   Optical properties of SnO2 thin films grown by atmospheric pressure chemical vapour deposition oxidizing SnCl4 [J].
Davazoglou, D .
THIN SOLID FILMS, 1997, 302 (1-2) :204-213
[6]   ELECTRICAL AND OPTICAL CHARACTERIZATION OF SBSNO2 [J].
HE, YS ;
CAMPBELL, JC ;
MURPHY, RC ;
ARENDT, MF ;
SWINNEA, JS .
JOURNAL OF MATERIALS RESEARCH, 1993, 8 (12) :3131-3134
[7]  
HELMERSSON U, 1996, THIN SOLID FILMS, V281, P228
[8]  
HWANG HL, 1996, APPL SURF SCI, V92, P167
[9]   ELECTRICAL-CONDUCTIVITY OF TIN OXIDE-FILMS PREPARED BY THE SOL-GEL METHOD [J].
MADDALENA, A ;
DALMASCHIO, R ;
DIRE, S ;
RACCANELLI, A .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1990, 121 (1-3) :365-369
[10]   FLUORESCENCE OF PYRENE IN SOL-GEL SILICA DERIVED FROM TRIETHOXYSILANE [J].
MATSUI, K ;
TOMINAGA, M ;
ARAI, Y ;
SATOH, H ;
KYOTO, M .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1994, 169 (03) :295-300