MORPHOLOGY OF SNO2 THIN-FILMS OBTAINED BY THE SOL-GEL TECHNIQUE

被引：127

作者：

CHATELON, JP ^{[1
]}

TERRIER, C ^{[1
]}

BERNSTEIN, E ^{[1
]}

BERJOAN, R ^{[1
]}

ROGER, JA ^{[1
]}

机构：

[1] CNRS,LAB ODEILLO,FONT ROMEU,FRANCE

来源：

THIN SOLID FILMS | 1994年 / 247卷 / 02期

关键词：

D O I：

10.1016/0040-6090(94)90794-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Starting from alkoxides prepared in the laboratory, undoped and Sb-doped tin dioxide (SnO2) thin films have been deposited using the sol-gel dip-coating method. These layers have been characterized in relation to the environmental conditions during the pulling phase of the process. Among other parameters, the relative humidity ratio in the dip-coating apparatus has been found to be a key factor, for the morphology of the films as well as for the introduction of Sb-doping atoms. Characterization has been carried out by scanning electron microscopy, high resolution transmission electron microscopy and electron spectroscopy for chemical analysis.

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页码：162 / 168

页数：7

相关论文

共 17 条

[1] SOL-GEL DERIVED TRANSPARENT IR-REFLECTING ITO SEMICONDUCTOR COATINGS AND FUTURE APPLICATIONS [J].

ARFSTEN, NJ .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 63 (1-2) :243-249

[2] SOL-GEL LOW-TEMPERATURE PREPARATION OF SILICA FILMS - RBS, TEM AND MOS C-V CHARACTERIZATION [J].

BOELLE, A ;

ROGER, JA ;

CANUT, B ;

MUGNIER, J ;

PITAVAL, M .

APPLIED SURFACE SCIENCE, 1990, 46 (1-4) :200-205

[3]

BRIGGS D, 1983, PRACTICAL SURFACE AN, P484

[4] REVIEW OF SOL-GEL THIN-FILM FORMATION [J].

BRINKER, CJ ;

HURD, AJ ;

SCHUNK, PR ;

FRYE, GC ;

ASHLEY, CS .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1992, 147 :424-436

[5] INTERRELATIONSHIP BETWEEN DEPOSITION TEMPERATURE AND MORPHOLOGY OF SNO2 FILMS DEPOSITED BY A PYROSOL PROCESS [J].

CAILLAUD, F ;

SMITH, A ;

BAUMARD, JF .

THIN SOLID FILMS, 1992, 208 (01) :4-6

[6] VARIATION OF RESISTIVITY WITH THICKNESS OF TIN OXIDE-FILMS GROWN BY SPRAY PYROLYSIS [J].

CHAUDHURI, UR ;

RAMKUMAR, K ;

SATYAM, M .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1990, 23 (07) :994-995

[7] OPTICAL-PROPERTIES OF NON-STOICHIOMETRIC TIN OXIDE-FILMS OBTAINED BY REACTIVE SPUTTERING [J].

CZAPLA, A ;

KUSIOR, E ;

BUCKO, M .

THIN SOLID FILMS, 1989, 182 :15-22

[8] TIN OXIDE COATINGS - PHYSICAL-PROPERTIES AND APPLICATIONS [J].

DEWAAL, H ;

SIMONIS, F .

THIN SOLID FILMS, 1981, 77 (1-3) :253-258

[9]

FU GH, 1989, J NON-CRYST SOLIDS, V112, P454, DOI 10.1016/0022-3093(89)90572-3

[10] TIN OXIDE SURFACES .17. AN INFRARED AND THERMOGRAVIMETRIC ANALYSIS OF THE THERMAL DEHYDRATION OF TIN(IV) OXIDE GEL [J].

HARRISON, PG ;

GUEST, A .

JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS I, 1987, 83 :3383-3397