INTERRELATIONSHIP BETWEEN DEPOSITION TEMPERATURE AND MORPHOLOGY OF SNO2 FILMS DEPOSITED BY A PYROSOL PROCESS

被引：16

作者：

CAILLAUD, F ^{[1
]}

SMITH, A ^{[1
]}

BAUMARD, JF ^{[1
]}

机构：

[1] ECOLE NATL SUPER CERAM IND,CNRS,UA 320,47 A 73 AVE ALBERT THOMAS,F-87065 LIMOGES,FRANCE

来源：

THIN SOLID FILMS | 1992年 / 208卷 / 01期

关键词：

D O I：

10.1016/0040-6090(92)90937-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

SnO2 films have been deposited on hot alumina substrates using a pyrosol technique. Depending on the deposition temperature (from 450 up to 600-degrees-C), the textures range from dense to porous deposits. The morphologies obtained are discussed according to models developed for conventional CVD techniques where the deposition temperatures are much greater than for the pyrosol method.

引用

页码：4 / 6

页数：3

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