Optodynamics of laser ablation of graduation lines in chromium thin film on glass

被引：1

作者：

Kopac, S ^{[1
]}

Pirs, J ^{[1
]}

Mozina, J ^{[1
]}

机构：

[1] UNIV LJUBLJANA,FAC MECH ENGN,LJUBLJANA,SLOVENIA

来源：

APPLIED SURFACE SCIENCE | 1996年 / 96-8卷

关键词：

D O I：

10.1016/0169-4332(96)80026-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The line opening process in the direct laser writing of graduation lines has been investigated as a typical optodynamic process. Two phase removal of the thin chromium film was assumed and analyzed experimentally and theoretically. The transmitted portion of the incoming laser pulse and the optoacoustic wave amplitude have been detected and used in monitoring the line opening dynamics.

引用

页码：420 / 424

页数：5

共 8 条

[1]

[Anonymous], 1992, SMITHELLS METALS REF

[2] SURFACE RIPPLING INDUCED IN THIN-FILMS BY A SCANNING LASER [J].

CLINE, HE .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (01) :443-448

[3] Optodynamic analysis of direct laser writing of graduation lines [J].

Kopac, S ;

Pirs, J ;

Mozina, J .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1996, 62 (01) :77-82

[4] THE INFLUENCE OF THERMAL-DIFFUSION ON LASER-ABLATION OF METAL-FILMS [J].

MATTHIAS, E ;

REICHLING, M ;

SIEGEL, J ;

KADING, OW ;

PETZOLDT, S ;

SKURK, H ;

BIZENBERGER, P ;

NESKE, E .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1994, 58 (02) :129-136

[5]

METEV SM, 1994, LASER ASSISTED MICRO, V19, P35

[6]

POSSIN GE, 1981, P C LASER ELECTRON B, P73

[7] 2-PHASE MECHANISM OF LASER-INDUCED REMOVAL OF THIN ABSORBING FILMS .2. EXPERIMENT [J].

VEIKO, VP ;

METEV, SM ;

STAMENOV, KV ;

KALEV, HA ;

JURKEVITCH, BM ;

KARPMAN, IM .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1980, 13 (08) :1571-&

[8] 2-PHASE MECHANISM OF LASER-INDUCED REMOVAL OF THIN ABSORBING FILMS .1. THEORY [J].

VEIKO, VP ;

METEV, SM ;

KAIDANOV, AI ;

LIBENSON, MN ;

JAKOVLEV, EB .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1980, 13 (08) :1565-1570

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