Structure, energetics, and vibrational properties of Si-H bond dissociation in silicon

被引:88
作者
Tuttle, B
Van de Walle, CG
机构
[1] Univ Illinois, Dept Phys, Urbana, IL 61801 USA
[2] Xerox Corp, Palo Alto Res Ctr, Palo Alto, CA 94304 USA
关键词
D O I
10.1103/PhysRevB.59.12884
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We investigate hydrogen dissociation from an isolated Si-H bond in bulk silicon, using ab initio density-functional total-energy calculations. From the bonding site, we find that hydrogen needs to overcome a barrier of less than 2.0 eV in order to reach the next lowest local minimum in the energy surface. This minimum occurs at the antibonding site and is 1.2 eV higher in energy than the ground state. In addition, we consider the role of lattice relaxations and free carriers during the dissociation process. We discuss the relevance of our results for Si-H dissociation in several systems, including the Si-SiO2 interface. [S0163-1829(99)05919-6].
引用
收藏
页码:12884 / 12889
页数:6
相关论文
共 26 条
[11]   SELF-CONSISTENT EQUATIONS INCLUDING EXCHANGE AND CORRELATION EFFECTS [J].
KOHN, W ;
SHAM, LJ .
PHYSICAL REVIEW, 1965, 140 (4A) :1133-&
[12]   Reduction of hot electron degradation in metal oxide semiconductor transistors by deuterium processing [J].
Lyding, JW ;
Hess, K ;
Kizilyalli, IC .
APPLIED PHYSICS LETTERS, 1996, 68 (18) :2526-2528
[13]  
PANKOVE JI, 1991, SEMICONDUCTORS SEMIM, V34
[14]   SELF-INTERACTION CORRECTION TO DENSITY-FUNCTIONAL APPROXIMATIONS FOR MANY-ELECTRON SYSTEMS [J].
PERDEW, JP ;
ZUNGER, A .
PHYSICAL REVIEW B, 1981, 23 (10) :5048-5079
[15]  
Street R.a., 1991, Hydrogenated amorphous silicon
[16]   EFFICIENT PSEUDOPOTENTIALS FOR PLANE-WAVE CALCULATIONS [J].
TROULLIER, N ;
MARTINS, JL .
PHYSICAL REVIEW B, 1991, 43 (03) :1993-2006
[17]   EFFICIENT PSEUDOPOTENTIALS FOR PLANE-WAVE CALCULATIONS .2. OPERATORS FOR FAST ITERATIVE DIAGONALIZATION [J].
TROULLIER, N ;
MARTINS, JL .
PHYSICAL REVIEW B, 1991, 43 (11) :8861-8869
[18]   Energetics of hydrogen in amorphous silicon: An ab initio study [J].
Tuttle, B ;
Adams, JB .
PHYSICAL REVIEW B, 1998, 57 (20) :12859-12868
[19]   Structure, dissociation, and the vibrational signatures of hydrogen clusters in amorphous silicon [J].
Tuttle, B ;
Adams, JB .
PHYSICAL REVIEW B, 1997, 56 (08) :4565-4572
[20]  
TUTTLE B, 1997, THESIS U ILLINOIS UR