Direct laser writing of ridge optical waveguides in silica-titania glass sol-gel films

被引:41
作者
Pelli, S
Righini, GC
Scaglione, A
Guglielmi, M
Martucci, A
机构
[1] UNIV SALERNO,FAC INGN,DIPARTIMENTO INGN ELETTR,LAB OTT,I-84100 SALERNO,ITALY
[2] UNIV PADUA,DIP INGN MECCAN,SEZ MAT,PADUA,ITALY
关键词
D O I
10.1016/0925-3467(95)00049-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Sol-gel process is attracting a growing attention as a rather simple technology with potential for low-cost batch manufacture of integrated optical waveguides. Here experimental results are presented on the fabrication of silica-titania sol-gel films and on their laser densification, a technique which may be very useful for rapid circuit prototyping. Transversally multimode waveguides with propagation loss around 1 dB/cm have been produced by selective densification using a CO2 laser. Data from optical and structural analysis of the sol-gel strips are reported and discussed.
引用
收藏
页码:119 / 126
页数:8
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