LASER PATTERNING SYSTEM FOR INTEGRATED-OPTICS AND STORAGE APPLICATIONS

被引：11

作者：

LAD, MG

NAIK, GM

SELVARAJAN, A

机构：

来源：

OPTICAL ENGINEERING | 1993年 / 32卷 / 04期

关键词：

INTEGRATED OPTICS; LASER LITHOGRAPHY; COMPUTER-AIDED LITHOGRAPHY;

D O I：

10.1117/12.61289

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A computer-controlled laser writing system for optical integrated circuits and data storage is described. The system is characterized by holographic (649F) and high-resolution plates. A minimum linewidth of 2.5 mum is obtained by controlling the system parameters. We show that this system can also be used for data storage applications.

引用

页码：725 / 729

页数：5

共 7 条

[1] FOCUSED LASER LITHOGRAPHIC SYSTEM [J].

BECKER, RA ;

SOPORI, BL ;

CHANG, WSC .

APPLIED OPTICS, 1978, 17 (07) :1069-1071

[2]

BENDEVID I, 1985, 3RD P EUR C INT OPT, V42, P34

[3]

GRIFFIN AC, 1988, MAKROMOL CHEM-RAPID, V9, P463

[4] LASER-BEAM WRITING SYSTEM FOR OPTICAL INTEGRATED-CIRCUITS [J].

HARUNA, M ;

YOSHIDA, S ;

TODA, H ;

NISHIHARA, H .

APPLIED OPTICS, 1987, 26 (21) :4587-4592

[5] LOW-LOSS TI-LINBO3 WAVEGUIDE BENDS AT GAMMA=1.3-MU-M [J].

MINFORD, WJ ;

KOROTKY, SK ;

ALFERNESS, RC .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1982, 18 (10) :1802-1806

[6] DIRECT LASER-BEAM WRITING ON YBACUO FILM FOR SUPERCONDUCTING MICROELECTRONIC DEVICES [J].

PANDEY, HC ;

JAIN, YK ;

BHATNAGAR, SK ;

SINGH, BR ;

KHOKLE, WS .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (08) :L1517-L1520

[7] LASER WRITING OF MASKS FOR INTEGRATED OPTICAL CIRCUITS [J].

WILSON, KE ;

MUELLER, CT ;

GARMIRE, EM .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1982, 5 (02) :202-204

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