DIRECT LASER-BEAM WRITING ON YBACUO FILM FOR SUPERCONDUCTING MICROELECTRONIC DEVICES

被引:9
作者
PANDEY, HC
JAIN, YK
BHATNAGAR, SK
SINGH, BR
KHOKLE, WS
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 08期
关键词
D O I
10.1143/JJAP.27.L1517
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L1517 / L1520
页数:4
相关论文
共 4 条
[1]  
BLAMIRE BG, 1987, J PHYS D, V20, P1330
[2]   PULSED LASER ETCHING OF HIGH-TC SUPERCONDUCTING FILMS [J].
INAM, A ;
WU, XD ;
VENKATESAN, T ;
OGALE, SB ;
CHANG, CC ;
DIJKKAMP, D .
APPLIED PHYSICS LETTERS, 1987, 51 (14) :1112-1114
[3]   DC-SQUID WITH HIGH-CRITICAL-TEMPERATURE OXIDE-SUPERCONDUCTOR FILM [J].
NAKANE, H ;
TARUTANI, Y ;
NISHINO, T ;
YAMADA, H ;
KAWABE, U .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (11) :L1925-L1926
[4]   MAGNETRON SPUTTERING AND LASER PATTERNING OF HIGH TRANSITION-TEMPERATURE CU OXIDE-FILMS [J].
SCHEUERMANN, M ;
CHI, CC ;
TSUEI, CC ;
YEE, DS ;
CUOMO, JJ ;
LAIBOWITZ, RB ;
KOCH, RH ;
BRAREN, B ;
SRINIVASAN, R ;
PLECHATY, MM .
APPLIED PHYSICS LETTERS, 1987, 51 (23) :1951-1953