Evidence for field emission in electroformed metal-insulator-metal devices

被引:8
作者
Sharpe, RG [1 ]
Palmer, RE [1 ]
机构
[1] UNIV BIRMINGHAM, SCH PHYS & SPACE RES, NANOSCALE PHYS RES LAB, BIRMINGHAM B15 2TT, W MIDLANDS, ENGLAND
关键词
field emission; conductivity;
D O I
10.1016/S0040-6090(96)08804-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Evidence that Fowler-Nordheim field emission contributes significantly to the device current passing through electroformed metal-insulator-metal (MIM) devices at high voltage has been found by recording the low temperature current-voltage characteristics of Cu-SiOx-Cu devices, At low voltages (< 10 V) the conduction can be modelled by mechanisms in which, after emission from a given trap, the carriers are captured by the next trap in the filament chain (i.e., either 1-dimensional Poole-Frenkel conduction or tunnelling between adjacent traps). However, at higher voltages (10-15 V), we find evidence of an additional conduction mechanism, Fowler-Nordheim field emission. The onset of this mechanism coincides with the onset of electron emission, most of which occurs at near ballistic energies, indicating that a small fraction of this current is capable of traversing the remainder of the insulator and the top metal layer without significant energy loss.
引用
收藏
页码:164 / 170
页数:7
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