Characterization and properties of Ge1-x-Cx:H compounds obtained by X-ray CVD of germane/ethyne systems:: Effect of the irradiation dose

被引：7

作者：

Benzi, P

Bottizzo, E

Demaria, C

机构：

[1] Univ Turin, Dipartimento Chim Gen & Organ Applicata, I-10125 Turin, Italy

[2] Univ Turin, Ctr Excellence, NIS, I-10125 Turin, Italy

[3] Ist Nazl Fis Mat, I-16152 Genoa, Italy

来源：

CHEMICAL VAPOR DEPOSITION | 2006年 / 12卷 / 01期

关键词：

binary alloys; germanium carbide; radiolysis; X-ray;

D O I：

10.1002/cvde.200506411

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Amorphous germanium carbides have been prepared by X-ray activated CVD from germane/ethyne systems containing from 10 % to 80 % of ethyne. The effects of the dosage on the composition, characteristics, and properties of the solids obtained have been investigated. The composition of the material is found to change depending on both the ethyne percentage in the mixture and the irradiation time. Electron paramagnetic resonance (EPR), X-ray diffraction (XRD) analysis, and infrared spectroscopy (IRS) results indicate that the solids are formed by a randomly bound network of carbon and germanium atoms with hydrogen atoms terminating all the dangling bonds. Optical gap values higher than 3.0 eV, and increasing with the carbon molar fraction of the solid, have been found.

引用

页码：25 / 32

页数：8

共 55 条

[31] STRUCTURE AND TRANSPORT-PROPERTIES OF AMORPHOUS GE1-XCX-H THIN-FILMS OBTAINED BY ACTIVATED REACTIVE EVAPORATION [J].

KUMAR, S ;

KASHYAP, SC ;

CHOPRA, KL .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1988, 101 (2-3) :287-290

[32] Structural studies on hydrogenated amorphous germanium-carbon films prepared by RF sputtering [J].

Kumeda, M ;

Masuda, A ;

Shimizu, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (4A) :1754-1759

[33] Some peculiarities in ultraviolet absorption spectra for hydrogenated amorphous carbon thin films [J].

Lazar, G .

MATERIALS LETTERS, 2002, 57 (03) :586-588

[34]

LEY L, 1984, PHYS HYDROGENATED AM, V2

[35] LOCAL BONDING OF HYDROGEN IN A-SI H, A-GE H AND A-SI, GE H ALLOY-FILMS [J].

LUCOVSKY, G .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 76 (01) :173-186

[36] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS [J].

LUCOVSKY, G .

SOLID STATE COMMUNICATIONS, 1979, 29 (08) :571-576

[37] Raman spectroscopy and scanning electron microscopy investigation of annealed amorphous carbon-germanium films deposited by d.c. magnetron sputtering [J].

Mariotto, G ;

Vinegoni, C ;

Jacobsohn, LG ;

Freire, FL .

[38] Thin films of amorphous germanium-carbon alloy prepared by radio-frequency magnetron sputtering [J].

Maruyama, T ;

Akagi, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1996, 143 (12) :4087-4089

[39] THE ELECTRONIC AND ATOMIC-STRUCTURE OF HYDROGENATED AMORPHOUS SI-C ALLOYS [J].

ROBERTSON, J .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1992, 66 (05) :615-638

[40] IR SPECTROSCOPY AND STRUCTURE OF RF MAGNETRON SPUTTERED A-SIC-H FILMS [J].

RUBEL, H ;

SCHRODER, B ;

FUHS, W ;

KRAUSKOPF, J ;

RUPP, T ;

BETHGE, K .

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 1987, 139 (01) :131-143

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