Fast photography of UV laser ablated metal films

被引：8

作者：

Dyer, PE

Karnakis, DM

Key, PH

Sands, D

机构：

[1] Department of Applied Physics, University of Hull

来源：

APPLIED SURFACE SCIENCE | 1997年 / 109卷

关键词：

D O I：

10.1016/S0169-4332(96)00654-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The single pulse KrF laser ablation patterning of thin metal films on polyethylene terephthalate (PET) and alpha-Si:H substrates has been studied using fast shadow photography. The photographs of the ablated products were taken using 5 ns dye laser illumination as a time-series, delayed with respect to the ablation laser. This visualisation of the ablation process together with post-ablation examination of the irradiated site has allowed the dynamics of the products and the laser fluence 'window' for effective removal from the substrate to be established.

引用

收藏

页码：168 / 173

页数：6

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