Zeptogram-scale nanomechanical mass sensing

被引:868
作者
Yang, YT [1 ]
Callegari, C [1 ]
Feng, XL [1 ]
Ekinci, KL [1 ]
Roukes, ML [1 ]
机构
[1] CALTECH, Kavli Nanosci Inst, Pasadena, CA 91125 USA
关键词
D O I
10.1021/nl052134m
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Very high frequency (VHF) nanoelectromechanical systems (NEMS) provide unprecedented sensitivity for inertial mass sensing. We demonstrate in situ measurements in real time with mass noise floor similar to 20 zg. Our best mass resolution corresponds to similar to 7 zg, equivalent to similar to 30 xenon atoms or the mass of an individual 4 kDa molecule. Detailed analysis of the ultimate sensitivity of such devices based on these experimental results indicates that NEMS can ultimately provide inertial mass sensing of individual intact, electrically neutral macromolecules with single-Dalton (1 amu) resolution.
引用
收藏
页码:583 / 586
页数:4
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