Origin and avoidance of droplets during laser ablation of metals

被引:43
作者
Fahler, S
Stormer, M
Krebs, HU
机构
[1] Institut für Metallphysik, SFB 345, Universität Göttingen, 37073 Göttingen
关键词
D O I
10.1016/S0169-4332(96)00782-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
During pulsed laser deposition (PLD) of metals (and other materials) one typical problem occurs: beside atoms and ions macroscopic droplets (up to some mu m) are expelled from the roughening target and are deposited on the film surface. In the case of metals two kinds of droplets are observed during laser ablation, which have different sizes, angular distributions, velocities, and dependencies on the number of pulses, target roughening and energy density. These experiments indicate different origins for the two types of droplets: expelling from the cones growing out of the target and expelling from the molten surface. Consequences for the reduction and avoidance of these droplets are discussed.
引用
收藏
页码:433 / 436
页数:4
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