Versatile scanning near-field optical microscope for material science applications

被引:37
作者
Gucciardi, PG
Labardi, M
Gennai, S
Lazzeri, F
Allegrini, M
机构
[1] SCUOLA NORMALE SUPER PISA,I-56126 PISA,ITALY
[2] UNIV MESSINA,DIPARTIMENTO FIS MAT & TECHNOL FIS AVANZATE,I-89166 SANT AGATA,MESSINA,ITALY
关键词
D O I
10.1063/1.1148246
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We describe an aperture emission mode scanning near-field optical microscope (SNOM), optimized for material surface science applications. This instrument can be operated in both transmission and reflection configurations, in order to investigate transparent as well as opaque samples. It employs optical shear-force detection for tip/sample distance control, designed to minimize interference with the probe light. The SNOM head has been fully integrated on a homemade atomic force microscope platform and is placed in a controlled atmosphere chamber for reduction of surface contaminants. Within the compactness and the versatility obtained in our instrument, we have been able to optically discriminate different materials with a lambda/20 lateral resolution, and to distinguish polymeric aggregates, without damaging the surface, in spite of their rather poor optical contrast. (C) 1997 American Institute of Physics.
引用
收藏
页码:3088 / 3092
页数:5
相关论文
共 34 条
[31]   SCANNING NEAR-FIELD OPTICAL LITHOGRAPHY [J].
WEGSCHEIDER, S ;
KIRSCH, A ;
MLYNEK, J ;
KRAUSCH, G .
THIN SOLID FILMS, 1995, 264 (02) :264-267
[32]   Direct measurements of the true vibrational amplitudes shear force microscopy [J].
Wei, CC ;
Wei, PK ;
Fann, WS .
APPLIED PHYSICS LETTERS, 1995, 67 (26) :3835-3837
[33]   Near-field scanning optical microscopy in reflection: A study of far-field collection geometry effects [J].
Weston, KD ;
DeAro, JA ;
Buratto, SK .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (08) :2924-2929
[34]   APERTURELESS NEAR-FIELD OPTICAL MICROSCOPE [J].
ZENHAUSERN, F ;
OBOYLE, MP ;
WICKRAMASINGHE, HK .
APPLIED PHYSICS LETTERS, 1994, 65 (13) :1623-1625