Effect of laser fluence on the microstructure and dielectric properties of pulsed laser-deposited CaCu3Ti4O12 thin films

被引：11

作者：

Fang, Liang ^{[1
]}

Shen, Mingrong

机构：

[1] Suzhou Univ, Dept Phys, Suzhou 215006, Peoples R China

来源：

JOURNAL OF CRYSTAL GROWTH | 2008年 / 310卷 / 15期

关键词：

polycrystalline deposition; perovskites; dielectric materials;

D O I：

10.1016/j.jcrysgro.2008.05.011

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Polycrystalline CaCu3Ti4O12 (CCTO) films were grown on Pt/Ti/SiO2/Si substrates using pulsed laser deposition. The choice of optimal laser fluence was found to be important to the microstructure and dielectric properties of CCTO films. Thin films with a (2 2 0) preferential orientation were obtained in a narrow fluence range of 1.8-2.0J/cm(2). Moreover, the CCTO films deposited at 2.0 J/cm(2) showed high dielectric constant (2474) and low dielectric loss (0.05) at 10 kHz, which was ascribed to the improved crystallinity. (c) 2008 Elsevier B.V. All rights reserved.

引用

页码：3470 / 3473

页数：4

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